E-Catalog > Cavity Ring-Down Spectroscopy CRDS > Semiconductor Real-time AMC Monitoring for the Process Floor

The Picarro SAM-S and SAM-C AMC Monitoring Systems integrate Picarro’s industry leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system. Traditional sampler designs degrade individual analyzer performance through the use of a linear manifold which limits the gas flow rate to each analyzer. As a result, traditional samplers relegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether.

The superior design of the SAM system is optimized to ensure the highest combined performance, utilizing a patent-pending non-linear multiplexing system that enables high gas flow rates, minimizes cross port contamination, and quickly reports accurate contaminant concentrations. The Picarro SAM-S and SAM-C systems can be configured to sample multiple locations, accommodate multiple analyzers, and be paired with Picarro’s SI series of analyzers to measure a variety of contaminants.

The Picarro SI Series analyzers offer the power of extreme sensitivity and accuracy for AMC, FOUP and fab equipment monitoring in a highly reliable, simple and compact design. These analyzers combine best-in-class performance, SEMI standards compliance, easy installation and very low cost of annual maintenance compared to any other AMC monitoring technique.

Key features

• Inline AMC monitoring system
• Measures NH3, HF and HCl at ppt levels
• Response time within seconds
• Minimal setup time
• Monitor multiple locations within a cleanroom
• 8-, 16- or 32-port sampling system
• Onboard industrial computer with built-in keyboard
• Secure software and communications
• Programmed cleaning cycle
• Scheduled port purging to minimize cross port contamination

Benefits

• Long term accuracy
• No field calibration
• Fast recovery from pressure spikes (20s)
• Automatic bypass control
• Minimal maintenance
• Low cost of ownership

Compatible Analyzers

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